RF Matcher
An advanced impedance matching device that optimizes the efficient delivery of high-frequency power to process chambers.
Asendia features proprietary technology capable of achieving matching speeds under 1ms.
ASENDIA RF Match Networks provide accurate, fast, and reliable matching. All of our match network hardware and specifications
are customizable to correspond with the customer requirements.
ASENDIA offers a variety of products in two major line-ups; Premium line & Budget-friendly line. Premium match networks
offer the best performance with numerous functions, while Budget-friendly match networks are cost-effective products
that contain only the key main functions.
Features
-
Continuous and
pulsed RF Matching -
Flexible in
customization -
EtherCAT interface
-
Auto preset &
Multi-preset -
New Technologies
(Quantum + Matching)
Specifications
| AFC Series | AQC Series | |
| Shape | Customized design for each chamber | |
| Frequency Range | 350kHz - 100MHz | |
| Max PF Input Range | 10kW (With the exception of some areas) | |
| Matching Time | Within 1sec from preset position with RF input stable | |
| Matching Accuracy | 5W or less than 1% of the set power, whichever is greater | |
| Interface | RS-232C / RS-485 / EtherNet (Option : Analog / D-Net / EtherCAT) | |
| Function | CW, Pulse, VF, Quantum Matching | |
| Power Supply | AC220V (0.5A or 1A) or DC24V (4A or 6A) | |
| Safety features | Coaxial cable not connected, FAN Alarm, Motor Alarm, Temp Alarm | |
| Cooling Method | Air Cooling or Water Cooling | |